EUV is moving to full production in fits and starts, and the industry is slightly positive on its long-term trends. Much remains to be done, however, if we want to see EUV lithography by 2021-2022.
from ExtremeTechExtremeTech http://www.extremetech.com/computing/223834-after-years-of-setbacks-semiconductor-industry-is-cautiously-optimistic-about-euv-lithography
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